Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
Reexamination Certificate
2005-06-30
2009-12-15
Deo, Duy-Vu N (Department: 1792)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
C156S345150, C156S345180, C156S345210, C156S345220
Reexamination Certificate
active
07632376
ABSTRACT:
An apparatus for processing a substrate is provided which includes a first process window configured to apply a first fluid meniscus between the first process window and a surface of the substrate. The apparatus further includes a second process window configured to generate a second fluid meniscus between the second process window and the surface of the substrate. The apparatus further includes a third process window configured to generate a third fluid meniscus between the third process window and the surface of the substrate. The apparatus is configured to apply the first fluid meniscus, the second fluid meniscus, and the third fluid meniscus to the surface of the substrate in order during an atomic layer deposition operation.
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Korolik Mikhail
Ravkin Mike
Wilcoxson Mark
Deo Duy-Vu N
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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