Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-01-21
2008-12-09
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237200, C356S237300, C356S237500
Reexamination Certificate
active
07463352
ABSTRACT:
A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.
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Elysaf Emanuel
Karpol Avner
Kenan Boaz
Reinhorn Silviu
Yalov Shimon
Applied Materials Inc.
Nguyen Sang
Patterson & Sheridan LLP
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