Method and apparatus for annealing copper films

Details Method and apparatus for annealing copper films Method and apparatus for annealing copper films

2007-03-20

2007-03-20

Wyszomierski, George (Department: 1742)

Metal treatment

Process of modifying or maintaining internal physical...

Producing or treating layered, bonded, welded, or...

C205S224000

Reexamination Certificate

active

10611589

ABSTRACT:
A method and apparatus for annealing copper. The method comprises forming a copper layer by electroplating on a substrate in an integrated processing system and annealing the copper layer in a chamber inside the integrated processing system.

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