Method and apparatus for angular-resolved spectroscopic...

Details Method and apparatus for angular-resolved spectroscopic... Method and apparatus for angular-resolved spectroscopic...

2006-09-25

2009-08-11

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S625000, C356S400000, C356S401000

Reexamination Certificate

active

07573584

ABSTRACT:
Both the 1stand 0thdiffraction orders are detected in a scatterometer. The 1stdiffraction orders are used to detect the overlay error. The 0thdiffraction order is then used to flag if this is a false overlay error calculation of magnitude greater than the bias but smaller than the pitch of the grating.

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