Method and apparatus for analyzing gas flow in a gas panel

Details Method and apparatus for analyzing gas flow in a gas panel Method and apparatus for analyzing gas flow in a gas panel

2006-08-08

2006-08-08

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of mechanical system

C702S045000, C702S050000, C702S100000

Reexamination Certificate

active

07089134

ABSTRACT:
One embodiment of the present invention is a method for analyzing gas flow in a gas transmission unit of a gas panel that includes: (a) monitoring a measure of gas flow output from a mass flow controller included in the gas transmission unit; (b) monitoring a measure of gas pressure output from a pressure regulator included in the gas transmission unit; and (c) analyzing the measure of gas flow and the measure of gas pressure to determine whether gas flow is stable in the gas transmission unit.

REFERENCES:
patent: 5324478 (1994-06-01), Mermoud et al.
patent: 5342580 (1994-08-01), Brenner
patent: 6425281 (2002-07-01), Sheriff et al.
patent: 6851316 (2005-02-01), Micke et al.

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