Method and apparatus for an atmospheric scanning electron micros

Details Method and apparatus for an atmospheric scanning electron micros Method and apparatus for an atmospheric scanning electron micros

1984-05-14

1986-06-24

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, G01N 2300

Patent

active

045969280

ABSTRACT:
A new detection configuration devised for the Scanning Electron Microscope (SEM), which allows the imaging of the surfaces of a specimen at atmospheric pressure. Such a detection configuration gives rise to a new microscope: the Atmospheric Scanning Electron Microscope (ASEM). In this configuration the detector means, such as a backscattered electron detector, is placed between the pressure limiting aperture and the electron column. The electron beam passes through the final aperture, reaches the sample under atmospheric conditions and the backscattered electrons (or other signals) are allowed to reach the detector. The new configuration makes it possible for specimens or materials to be viewed in an open room. Examination of materials, not only in their natural state but also in their natural position, is possible. This feature of the ASEM will be extremely useful in areas where sampling is impossible, expensive or critical for the test subject, e.g. skin, live tissue, archaelogical findings, machine components and aircraft wings. The ASEM can also be made to function at the full pressure range between 0-1 atmospheres.

REFERENCES:
patent: Re27005 (1970-12-01), Wingfield et al.
patent: 3222496 (1965-12-01), Windebank
patent: 3346736 (1967-10-01), Neuhaus
patent: 3626184 (1971-12-01), Crewe
patent: 3629579 (1971-12-01), Naltou
patent: 4177379 (1979-12-01), Furukawa
"The Environmental Control Stage", Lane, Scanning Electron Microscopy, IITRI, Chicago, pp. 43-48 (1970).
"The SEM Examination of Wet Specimens", Robinson, Scanning, vol. 1, pp. 149-156 (1978).

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