Method and apparatus for aligning surfaces in close proximity

Details Method and apparatus for aligning surfaces in close proximity Method and apparatus for aligning surfaces in close proximity

1996-11-21

1999-03-02

Bennett, G. Bradley

Geometrical instruments

Gauge

Collocating

33533, 33366, 340686, G01D 2102, G08B 2100

Patent

active

058755608

ABSTRACT:
Apparatus and method are disclosed for adjusting the alignment of surfaces in close proximity. The apparatus includes at least three travel sensitive switches fixed in a non-linear configuration, each switch having a known actuating distance, and a display connected to the switches to show the status of each switch. In order to align two surfaces in parallel, the switches have essentially the same actuating distance. The switches are placed between the surfaces and the surfaces are moved together until the display shows that one or more switches is actuated. The information provided by the switches guides alignment of the surfaces to achieve essentially simultaneous actuation of all switches having actuating distances which correspond to a desired alignment when the surfaces are moved within the actuating distances of the switches. A second set of at least three travel sensitive switches having a smaller actuating distance than the first set of switches can be used to simplify the alignment process. The apparatus and method are especially useful in aligning parallel surfaces in chemical vapor deposition equipment for making integrated circuits.

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patent: 5432503 (1995-07-01), Pekar
patent: 5640779 (1997-06-01), Rolloff et al.
patent: 5729221 (1998-03-01), Krolopp et al.

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