Method and apparatus for aligning and supporting semiconductor p

Details Method and apparatus for aligning and supporting semiconductor p Method and apparatus for aligning and supporting semiconductor p

1996-03-08

1998-03-31

Breneman, R. Bruce

Pipes and tubular conduits

Combined

With external support structure

137315, 137613, 248 65, 248 744, 285 61, 118715, F16L 300, F16L 5500, F17D 102, C23C 1600

Patent

active

057327440

ABSTRACT:
A mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components are mounted on individual upper clamp members which are secured to lower clamp members to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member for subsequent longitudinal positioning and joining of adjacent fittings.

REFERENCES:
patent: 1722236 (1929-07-01), Schoneberger
patent: 2761714 (1956-09-01), Cuskie
patent: 3414219 (1968-12-01), Siegel
patent: 3999784 (1976-12-01), Kennedy
patent: 4267994 (1981-05-01), Lynch et al.
patent: 4429497 (1984-02-01), Didernardi
patent: 4927103 (1990-05-01), Nicholson
patent: 5421383 (1995-06-01), Schmid

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