Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1982-07-14
1983-08-30
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118620, 118723, 156646, 156345, 204192EC, 204192E, 204298, 427 39, 427 95, B05D 306, B05B 502, B44C 122, C03C 1500
Patent
active
044015070
ABSTRACT:
Method and apparatus for improved uniformity in an externally excited non-thermal chemical reaction process. In the inventive process, the reactant is externally activated for a time short compared with the time during which reactant depletion would otherwise occur. The reactant is then deactivated for a period of time comparable to the transit time across the workload. In this way improved uniformity is obtained by reducing the depletion of the reactant as it flows across the workload.
REFERENCES:
patent: 4292153 (1981-09-01), Kudo et al.
Advanced Semiconductor Materials/AM.
Powell William A.
Weiss Harry M.
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