Method and apparatus for abatement of reaction products from...

Details Method and apparatus for abatement of reaction products from... Method and apparatus for abatement of reaction products from...

2005-05-03

2005-05-03

Silverman, Stanley S. (Department: 1754)

Hazardous or toxic waste destruction or containment

Containment

Solidification, vitrification, or cementation

C588S253000, C588S253000, C423S24000R, C423S24000R, C095S131000, C095S233000

Reexamination Certificate

active

06888040

ABSTRACT:
An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil disposed about the reaction chamber, and a power source for supplying RF energy to the coil. The coil creates a plasma in the reaction chamber which effectively breaks down stable reaction products from the vacuum processing chamber such as perfluorocarbons (PFCs) and hydrofluorocarbons (HFCs) which significantly contribute to global warming. According to alternative embodiments, the plasma may be generated with grids or coils disposed in the reaction chamber perpendicular to the flow of reaction products from the vacuum processing chamber.

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