Method and apparatus for a reflective spatial light...

Details Method and apparatus for a reflective spatial light... Method and apparatus for a reflective spatial light...

2006-06-27

2006-06-27

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

07068417

ABSTRACT:
An electro-mechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region within a first portion of the flexible member and a tip region within a second portion of the flexible member. The system also comprises a reflective member coupled to the flexible member, including a reflective surface and a backside region, the backside region being coupled to the second end of the flexible member, the reflective surface being substantially parallel to the surface region while the reflective member is in a first state and being substantially non-parallel to the surface region while the reflective member is in a second state, whereupon the flexible member moves from a first position characterized by the first state to a second position characterized by the second state.

REFERENCES:
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4317611 (1982-03-01), Petersen
patent: 4566935 (1986-01-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5382961 (1995-01-01), Gale, Jr.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5489952 (1996-02-01), Gove et al.
patent: 5504614 (1996-04-01), Webb et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5600363 (1997-02-01), Hornbeck
patent: 5600383 (1997-02-01), Hornbeck
patent: 5661591 (1997-08-01), Lin et al.
patent: 5663749 (1997-09-01), Fams et al.
patent: 5742419 (1998-04-01), Dickensheets et al.
patent: 5757536 (1998-05-01), Rioco et al.
patent: 5793519 (1998-08-01), Furlani et al.
patent: 5835256 (1998-11-01), Huibers
patent: 5885468 (1999-03-01), Kozlowski
patent: 5939171 (1999-08-01), Biebl
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6038056 (2000-03-01), Florence et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6049317 (2000-04-01), Thompson et al.
patent: 6127756 (2000-10-01), Iwaki et al.
patent: 6172797 (2001-01-01), Huibers
patent: 6201521 (2001-03-01), Doherty
patent: 6252277 (2001-06-01), Chan et al.
patent: 6285490 (2001-09-01), Meier et al.
patent: 6323982 (2001-11-01), Hornbeck
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6386661 (2002-05-01), Richards
patent: 6396619 (2002-05-01), Huibers et al.
patent: 6429033 (2002-08-01), Gee et al.
patent: 6529310 (2003-03-01), Huibers et al.
patent: 6538800 (2003-03-01), Huibers
patent: 6542653 (2003-04-01), Wu et al.
patent: 6543286 (2003-04-01), Garverick et al.
patent: 6809852 (2004-10-01), Tao et al.
patent: 6820988 (2004-11-01), van Drieenhuizen
patent: 6827866 (2004-12-01), Novotny
patent: 6856068 (2005-02-01), Miller et al.
patent: 6891654 (2005-05-01), Kurosawa et al.
patent: 6891655 (2005-05-01), Grebinski et al.
patent: 2002/0041455 (2002-04-01), Sawada et al.
patent: 2002/0071166 (2002-06-01), Jin et al.
patent: 2002/0071169 (2002-06-01), Bowers et al.
patent: 2002/0132389 (2002-09-01), Patel et al.
patent: 2003/0117686 (2003-06-01), DiCarlo
patent: 2003/0207487 (2003-11-01), Kubena et al.
patent: 2004/0000696 (2004-01-01), Ma et al.
patent: 2004/0004753 (2004-01-01), Pan
patent: 2004/0008402 (2004-01-01), Patel et al.
patent: 2004/0125347 (2004-07-01), Patel et al.
patent: 2004/0136044 (2004-07-01), Miller et al.
patent: 2004/0184133 (2004-09-01), Su et al.
patent: 2004/0190817 (2004-09-01), Aubuchon
patent: 2005/0041277 (2005-02-01), Huibers
Henley et al., “A New SOI Manufacturing Technology Using Atomic layer Cleaving.” Silicon Genesis Corporation Campbell CA. pp. 1-5.
Petersen, K.E., Micromechanical Light Modulator Array Fabricated On Silicon. Applied Physics Letters. Oct. 15, 1977, pp. 521-523, vol. 31 No. 8.
Petersen, K.E., Micromechanical Membrane Switches On Silicon. IBM J. Res. Develop., Jul. 1979, pp. 376-385. vol. 23, No. 4.

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