Method and apparatus for a MEMS micro-actuator assembly in a...

Dynamic magnetic information storage or retrieval – Head mounting – For adjusting head position

Reexamination Certificate

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Reexamination Certificate

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10986345

ABSTRACT:
A micro-actuator assembly, which includes a first micro-actuator. The first micro-actuator includes: Two pivot spring pairs coupling to first stator and second stator. Two flexure spring pairs and pitch spring pair coupling to central movable section, which includes signal pair paths coupling to read-write head of a slider. The central movable section positions read-write head and conducts read-write head signaling. First micro-actuator electrical stimulus is through some of its springs. Micro-actuator assembly may include second micro-actuator with third stator and fourth stator interacting with central movable section. The second micro-actuator may also provide motion sensing, possibly indicating collision with the rotating disk surface being accessed. The invention includes head gimbal assemblies, actuator arms, actuator assemblies, voice coil assemblies and hard disk drives containing various embodiments of these micro-actuator assemblies.

REFERENCES:
patent: 6507463 (2003-01-01), Boutaghou
patent: 6731471 (2004-05-01), Bonin
patent: 6853517 (2005-02-01), Hirano et al.
patent: 2004/0160702 (2004-08-01), Hirano et al.
Francis Tay E.H et al.; Electrostaic Spring Effect on the Dynamic Performance of Microresonators; 4 pages; National University of Singapore, Dept of Merchanical and Production Engineering, Singapore.
Nguyen, Hung, et all; A Novel MEMS Tunable Capacitor Based on Angular Vertical Comb Drive Actuators;4 pages; University of Los Angeles, Department of Electrical Engineering; Los Angeles, USA.
Liu, Chang; Bar-Cohen, Y.; Scaling Laws of Microactuators and Potential Applications of Electroactive Polymers in MEMS; Proceedings of SPIE's Annual International Symposium on Smart Structures and Materials; Mar. 1-5, 1999, Paper No. 3669-33; SPIE; Newport Beach, CA.
Takeshi, Morita, et al.; A Smooth Impact Rotation Motor Using a Multi-Layered Torsional Piezoelectric Actuator; IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Nov. 1999, vol. 46, No. 6; IEEE Utrasonics, Ferroelectrics and Frequency Control Society, Canada.
Tang, William; MEMS Resonators for Communication and Signal Processing Applications; slide presentation, Department of Biomedical Engineering; Univerity of California, Sep. 2003, USA.

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