Method and an apparatus for measuring a displacement between two

Details Method and an apparatus for measuring a displacement between two Method and an apparatus for measuring a displacement between two

1990-10-05

1992-09-29

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356349, 250548, G01B 1102

Patent

active

051517540

ABSTRACT:
A method and an apparatus for measuring a displacement between two objects. Corresponding pairs of regions of the two objects each have at least one diffraction grating which generate two-dimensionally distributed diffracted light beams. These light beams are diffracted and caused to interfere with each other in the paired regions, whereby two-dimensionally distributed diffracted interference light beams are emitted. A light beam of a specific order is detected from each of these diffracted interference light beams, and is converted into a beat signal. The displacement is obtained in accordance with the phase difference between these beat signals.

REFERENCES:
patent: 4838693 (1989-06-01), Uchida et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4902133 (1990-02-01), Tojo et al.
patent: 4988197 (1991-01-01), Ishibashi et al.

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