Stock material or miscellaneous articles – Composite – Of bituminous or tarry residue
Patent
1986-04-11
1988-02-16
Carroll, J.
Stock material or miscellaneous articles
Composite
Of bituminous or tarry residue
357 2, 357 4, 357 59, 357 65, 357 67, 357 68, 428620, 428660, H01L 2348, H01L 4500, H01L 2904
Patent
active
047258772
ABSTRACT:
Structures of alternating amorphous layers of titanium and a semiconductor material serve as effective interface layers between an insulator or semiconductor material and an aluminum metallization material in semiconductor devices. Such structures effectively serve to minimize interdiffusion during device manufacture without undue increase in electrical contact resistance during device operation.
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IBM, "Ohmic Contacts to Semiconductor Devices Using Barrier Layers of Aluminum and Titanium", IBM Technical Disclosure Bulletin, vol. 28, No. 4, Sep. 1985.
Wiley et al, "Amorphous Metallizations for High Temperature Semiconductor Device Applications", IEEE Transactions on Industrial Electronics, vol. IE-29, No. 2, May 1982.
Suni and Nicolet, "Stability of Amorphous Fe-W Alloys in Multilayer Metallizations on Silicon", Thin Solid Films, 107 (1983), pp. 73-80.
Brasen Daniel
Willens Ronald H.
American Telephone and Telegraph Company AT&T Bell Laboratories
Businger Peter A.
Carroll J.
Ngo Ngan
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