Metallization layer for a power semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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C438S674000

Reexamination Certificate

active

07737560

ABSTRACT:
A power semiconductor IC device is disclosed. In one embodiment, the device includes a substrate, and a layer structure formed on the substrate. The layer structure includes a metallization layer including copper, wherein the metallization layer is formed as a stack structure including at least two copper layers and a stabilization layer between the two copper layers.

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patent: 6126806 (2000-10-01), Uzoh
patent: 6180505 (2001-01-01), Uzoh
patent: 7190079 (2007-03-01), Andricacos et al.
patent: 2004/0121577 (2004-06-01), Yu et al.
patent: 2006/0160349 (2006-07-01), Wong et al.
patent: 2006/0202346 (2006-09-01), Shih et al.

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