Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-12-21
2010-10-26
Richards, N Drew (Department: 2895)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S572000, C438S573000, C438S584000, C438S613000, C257SE21411, C257SE21413
Reexamination Certificate
active
07820540
ABSTRACT:
Metallization contact structures and methods for forming a multiple-layer electrode structure on solar cells include depositing a conductive contact layer on a semiconductor substrate and depositing a metal bearing ink onto a portion of the conductive contact layer, wherein exposed portions of the conductive contact layer are adjacent to the metal bearing ink. The conductive contact layer is patterned by removing exposed portions of the conductive contact layer from the semiconductor substrate. The metal bearing ink is aligned with openings in a dielectric layer of the semiconductor substrate and with unexposed portions of the conductive contact layer. The unexposed portions of the conductive contact layer are interposed between the metal bearing ink and the dielectric layer such that the conductive contact layer pattern is aligned with metal bearing ink. The semiconductor substrate is thermally processed to form a current carrying metal gridline by sintering the metal bearing ink.
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Fork David K.
Xu Baomin
Lee Kyoung
Oliff & Berridg,e PLC
Palo Alto Research Center Incorporated
Richards N Drew
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