Metal selective polymer removal

Details Metal selective polymer removal Metal selective polymer removal

1992-09-03

1994-09-20

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156667, 156662, 156646, 156657, 156656, 156653, H01L 2100

Patent

active

053486196

ABSTRACT:
A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.

REFERENCES:
patent: 4566935 (1986-01-01), Hornbeck
patent: 4711017 (1987-12-01), Lammert
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 5030319 (1991-07-01), Nishino et al.
patent: 5055383 (1991-10-01), Koblinger et al.
patent: 5089084 (1992-02-01), Chhabra et al.
patent: 5181985 (1993-01-01), Lampert et al.
patent: 5200361 (1993-04-01), Omishi
patent: 5201992 (1993-04-01), Marcus et al.

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