Metal rinsing process with controlled metal microcorrosion reduc

Details Metal rinsing process with controlled metal microcorrosion reduc Metal rinsing process with controlled metal microcorrosion reduc

1997-12-09

2000-11-28

Gulakowski, Randy

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

134 28, 134 41, 430329, 430331, B08B 308, C23G 102, G03C 500

Patent

active

061530182

ABSTRACT:
Process for rinsing a metallized substrate subject to metal microcorrosion using an acidic aqueous rinsing solution wherein the rinsing solution comprises at least one strong inorganic acid in an amount enough to reduce the alkalinity of the rinse solution to a level low enough to reduce microcorrosion of the said metal layer while rinsing.

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patent: 5201960 (1993-04-01), Starov
patent: 5759751 (1998-06-01), Shimizu et al.
Journal of the Electrochemical Society, vol. 127, No. 2, Feb. 1980, pp. 386-395, XP002025557, Kaplan L H; Bergin B K: "Residues from wet processing of positive resists" * p. 390 --p. 395.
European Search Report dated Feb. 18, 1997.

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