Metal oxide, piezoelectric material and piezoelectric element

Details Metal oxide, piezoelectric material and piezoelectric element Metal oxide, piezoelectric material and piezoelectric element

2011-03-15

2011-03-15

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000, C252S06290R, C252S06290R, C501S134000

Reexamination Certificate

active

07906889

ABSTRACT:
Provided are a piezoelectric material without using lead or an alkali metal, the piezoelectric material having a stable crystal structure in a wide temperature range, high insulation property, and high piezoelectric property, and a piezoelectric element using the piezoelectric material, in which the piezoelectric material is made of a metal oxide having a tetragonal crystal structure and expressed by Ba(SixGeyTiz)O3(here, 0≦x≦1, 0≦y≦1, and 0≦z≦0.5), the piezoelectric element includes the piezoelectric material and a pair of electrodes sandwiching the piezoelectric material, and at least one of the pair of electrodes is made of SrRuO3or Ni.

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