Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2011-06-21
2011-06-21
Duda, Kathleen (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S330000
Reexamination Certificate
active
07964336
ABSTRACT:
The present invention is to provide a method for forming various patterns such as a metal or metal compound pattern, in which the amounts of the materials constituting the pattern which are removed during the formation step can be suppressed to the minimum. The method comprises a resin pattern forming step of forming on the surface of a substrate a resin pattern capable of absorbing a solution containing metal components, an absorbing step of dipping the resin pattern in the solution containing metal components to make the resin pattern absorb the solution containing metal components, a washing step of washing the substrate having formed thereon the resin pattern that has absorbed the solution containing metal components, and a burning step of burning the resin pattern after washing.
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English Translation of Furuse, JP 2000-090820, Mar. 31, 2000.
Furuse Tsuyoshi
Mori Shosei
Terada Masahiro
Canon Kabushiki Kaisha
Duda Kathleen
Fitzpatrick ,Cella, Harper & Scinto
Sullivan Caleen O
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