Metal ion reduction in the raw materials and using a Lewis base

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430168, 430169, 430192, 430193, 528482, 528486, 528145, 528146, 210660, 210681, 210688, G03F 700, G03C 172, C08G 804, C02F 142

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054767504

ABSTRACT:
The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a very low level of metal ions and a substantially consistent molecular weight. A method is also provided for producing photoresist composition from such novolak resins and for producing semiconductor devices using such photoresist compositions.

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