Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1995-06-02
1996-12-03
Baxter, Janet C.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430326, 430330, 430510, 430512, 430517, G03C 183
Patent
active
055807003
ABSTRACT:
The present invention provides a bottom anti-reflective coating compositions having a very low level of metal ions and a process for producing such compositions utilizing specially treated ion exchange resins. The present invention also provides photoresists produced using such bottom anti-reflective coating compositions and a method for producing semiconductor devices using such photoresists.
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Baxter Janet C.
Hoechst Celanese Corporation
Sayko Jr. Andrew F.
Young Christopher G.
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