Metal-insulator-metal capacitor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S532000

Reexamination Certificate

active

06927440

ABSTRACT:
An interconnection wiring system incorporating two levels of interconnection wiring separated by a first dielectric, a capacitor formed by a second dielectric, a bottom electrode of the lower interconnection wiring or a via and a top electrode of the upper interconnection wiring or a separate metal layer. The invention overcomes the problem of leakage current and of substrate stray capacitance by positioning the capacitor between two levels of interconnection wiring.

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K. Machida et al., Metal-insulator-Metal Capacitors by Using Electron Cyclotron Resonance Plasma-SiO2, Journal Vacuum Science Technology, B, 13(5), pp. 2013-2015, Sep./Oct. 1995.

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