Metal gate transistor and resistor and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S379000, C257S380000, C257S358000

Reexamination Certificate

active

07994576

ABSTRACT:
A method for fabricating metal gate transistor and resistor is disclosed. The method includes the steps of: providing a substrate having a transistor region and a resistor region; forming a shallow trench isolation in the substrate of the resistor region; forming a tank in the shallow trench isolation of the resistor region; forming at least one gate in the transistor region and a resistor in the tank of the resistor region; and transforming the gate into a metal gate transistor.

REFERENCES:
patent: 6162584 (2000-12-01), Chen
patent: 6406956 (2002-06-01), Tsai
patent: 6573134 (2003-06-01), Ma
patent: 7084478 (2006-08-01), Lee et al.
patent: 7602027 (2009-10-01), Burke et al.
patent: 2005/0148118 (2005-07-01), Zheng et al.
patent: 2007/0082440 (2007-04-01), Shiratake
patent: 2009/0236669 (2009-09-01), Chen

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