Metal film and manufacturing method therefor, and laminated...

Details Metal film and manufacturing method therefor, and laminated... Metal film and manufacturing method therefor, and laminated...

2005-11-22

2005-11-22

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S680000

Reexamination Certificate

active

06967163

ABSTRACT:
A metal film is made by forming a first non-uniform continuous metal film made of an electroless plating catalyst material on a supporting member using a vacuum thin-film forming method, and then forming a second metal film by electroless plating using the first metal film as a catalyst.

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