Metal etching process with etch rate enhancement

Details Metal etching process with etch rate enhancement Metal etching process with etch rate enhancement

1986-10-29

1988-05-31

Schor, Kenneth M.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156664, 156666, 134 2, 134 10, C23F 100

Patent

active

047479078

ABSTRACT:
A metal etching process involving an oxidation-reduction reaction where the metal being etched is oxidized and the active ingredient in the etchant solution is reduced, incorporates contacting said metal with an etching solution containing an active ingredient selected from the group consisting of ferric ions, ferricyanide ions, ceric ions, chromate ions, dichromate ions, and iodine, and introducing ozone into said etching solution to rejuvenate and agitate the solution.

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Weast, CRC Handbook of Chemistry and Physics 61st ed 1980-1981 pp. B-1.

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