Merged P-I-N/Schottky power rectifier having extended P-I-N junc

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – With switching speed enhancement means

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257260, 257485, 257156, 257476, H01L 2948

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active

052411958

ABSTRACT:
A merged P-I-N/Schottky power rectifier includes trenches, and P-N junctions along the walls of the trenches and along the bottoms of the trenches. By forming the P-N junctions along the trench walls, the total area of the P-N junctions relative to the surface area of the device can be increased, to thereby improve the device's on-state characteristics without sacrificing the total area of the Schottky region. The trenches may be U or V shaped in transverse cross-section or of other transverse cross-sectional shape, and the trenches may be polygonal or circular in top view.

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patent: 5101244 (1992-03-01), Mori et al.
Reactive Ion Etching of Silicon Trenches Using SF.sub.6 /O.sub.2 Gas Mixtures, Syau et al., J. Electrochem. Soc., vol. 138, No. 10, Oct. 1991, pp. 3076-3081.
Optimization of the MPS Rectifier Via Variation of Schottky Region Area, Tu et al., Proceedings of the 3rd International Symposium on Power Semiconductor Devices and ICs, Apr. 22-24, 1991, pp. 109-112.
The Theory and Practice of Microelectronics, S. K. Ghandhi, John Wiley & Sons, Inc., 1968, pp. 91-97.
Modern Power Devices, B. J. Baliga, John Wiley & Sons, Inc., 1987, pp. 263-343.
Analysis of a High-Voltage Merged p-i-n/Schottky (MPS) Rectifier, B. J. Baliga, IEEE Electron Device Letters, vol. EDL-8, No. 9, 1987, pp. 407-409.
The Merged P-I-N Schottky (MPS) Rectifier: A High-Voltage, High-Speed Power Diode, B. J. Baliga et al.; Proceedings of the IEDM--International Electron Devices Meeting, Washington, D.C., Dec. 1987, pp. 658-661.

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