Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate
2006-05-09
2006-05-09
Dinkins, Anthony (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
C361S282000, C361S292000
Reexamination Certificate
active
07042698
ABSTRACT:
A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.
REFERENCES:
patent: 5015906 (1991-05-01), Cho et al.
patent: 6215644 (2001-04-01), Dhuler
patent: 6355534 (2002-03-01), Cheng et al.
patent: 6380600 (2002-04-01), Alping
patent: 6541831 (2003-04-01), Lee et al.
patent: 6885537 (2005-04-01), Nakayama
patent: 6970340 (2005-11-01), Nakayama
patent: 1020020085990 (2002-11-01), None
Chu Kang-soo
Kim Weon-Hong
Won Seok-Jun
Dinkins Anthony
Lee & Morse P.C.
Samsung Electronics Co,. Ltd.
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