MEMS switch electrode configuration to increase signal...

Details MEMS switch electrode configuration to increase signal... MEMS switch electrode configuration to increase signal...

2007-12-18

2007-12-18

Enad, Elvin (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

10921696

ABSTRACT:
A microelectromechanical system (MEMS) switch is provided which includes a moveable electrode with an opening arranged over at least a portion of the signal trace. In some cases, the opening may include a notch arranged along a periphery of the moveable electrode. In particular, the opening may include a notch bound by two edges of the moveable electrode which are respectively arranged relative to opposing sides of the signal trace. In other embodiments, the opening may include a hole arranged interior to the peripheral edge of the moveable electrode. In some cases, the MEMS switch may include a plurality of contact structures coupled to signal traces. In such cases, the moveable electrode may include openings specifically arranged above a plurality of the signal traces.

REFERENCES:
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patent: 5638946 (1997-06-01), Zavracky
patent: 6307452 (2001-10-01), Sun
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patent: 1 235 244 (2002-08-01), None

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