Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-09-02
2010-12-14
SanMartin, J. (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S330000, C257S414000, C257S415000, C257S758000
Reexamination Certificate
active
07851975
ABSTRACT:
A microelectromechanical system (MEMS) structure and a fabricating method thereof are described. The MEMS structure includes a fixed part and a movable part. The fixed part is disposed on and connects with a substrate. The movable part including at least two first metal layers, a first protection ring and a first dielectric layer is suspended on the substrate. The first protection ring connects two adjacent first metal layers, so as to define a first enclosed space between the two adjacent first metal layers. The first dielectric layer is disposed in the enclosed space and connects the two adjacent first metal layers.
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patent: 2006140404 (2006-06-01), None
Chen Min
Ho Li-Hsun
Huang Chien-Hsin
Lan Bang-Chiang
Su Tzung-I
J.C. Patents
SanMartin J.
United Microelectronics Corp.
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