MEMS mirror system for laser printing applications

Details MEMS mirror system for laser printing applications MEMS mirror system for laser printing applications

2011-03-01

2011-03-01

Pham, Hai C (Department: 2861)

Incremental printing of symbolic information

Light or beam marking apparatus or processes

Scan of light

C347S255000

Reexamination Certificate

active

07898561

ABSTRACT:
A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

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