MEMS frequency standard for devices such as atomic clock

Oscillators – Molecular or particle resonant type

Reexamination Certificate

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Reexamination Certificate

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06900702

ABSTRACT:
A frequency standard has a cell formed in a cavity of a substrate. The cell contains a metal alkali vapor. The substrate has an optical path that intersects the cell. A light source is supported by the substrate and supplies light through the first optical path to the cell, and a light detector is supported by the substrate and receives light through the second optical path from the cell. The sealed vapor-filled cell is surrounded by a vacuum cavity enclosure. Bridges between the cell and the substrate may be used to thermally isolate the cell in the cavity and allow closed loop temperature control of the cell.

REFERENCES:
patent: 6265945 (2001-07-01), Delaney et al.
patent: 6570459 (2003-05-01), Nathanson et al.
S. Knappe et al., “Characterization of coherent population trapping resonances as atomic frequency references.” J. Opt. Soc. Am. B, vol. 18, No. 11/Nov. 2001, pp. 1545-1553.
J. Kitching et al., “Optical pumping noise in laser-pumped, all-optical microwave frequency references.” J. Opt. Soc. Am. B/vol. 18, No. 11/Nov. 2001, pp. 1676-1683.
J. Kitching et al., “A microwave frequency reference based on VCSEL-driven dark line resonances in Cs vapor”, IEEE Trans. Instrum. Meas. 49, 1313-1317 (2000).

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