Wave transmission lines and networks – Long line elements and components – Switch
Reexamination Certificate
2006-08-01
2006-08-01
Phan, Tho (Department: 2821)
Wave transmission lines and networks
Long line elements and components
Switch
C333S156000, C343S876000
Reexamination Certificate
active
07084724
ABSTRACT:
Systems and methods are provided that facilitate the formation of micro-mechanical structures and related systems on a laminated substrate. More particularly, a micro-mechanical device and a three-dimensional multiple frequency antenna are provided for in which the micro-mechanical device and antenna, as well as additional components, can be fabricated together concurrently on the same laminated substrate. The fabrication process includes a low temperature deposition process allowing for deposition of an insulator material at a temperature below the maximum operating temperature of the laminated substrate, as well as a planarization process allowing for the molding and planarizing of a polymer layer to be used as a form for a micro-mechanical device.
REFERENCES:
patent: 6417807 (2002-07-01), Hsu et al.
patent: 6469677 (2002-10-01), Schaffner et al.
patent: 6625004 (2003-09-01), Musolf et al.
patent: 6686820 (2004-02-01), Ma et al.
patent: 6924966 (2005-08-01), Prophet
patent: 2003/0015936 (2003-01-01), Yoon et al.
patent: 2003/0058069 (2003-03-01), Schwartz et al.
Cetiner et al.,Microwave Laminate PCB Compatible RF MEMS Technology for Wireless Communication Systems, Antennas and Propagation Society International Symposium, 2003. IEEE, Published Jun. 2003, vol. 1, pp. 387-390.
Cetiner, et al.,Monolithic Integration of RF MEMS Switches with a Diversity Antenna on PCB Substrate, IEEE Transactions on Microwave Theory and Techniques, vol. 15, No. 1, Jan. 2003, pp. 332-335.
Chang et al.,RF MEMS Switches Fabricated on Microwave-Laminate Printed Circuit Boards, IEEE Electron Device Letters, vol. 24, No. 4, Apr. 2003, pp. 227-229.
Bachman Mark
Cetiner Bedri A.
Chang Hung-Pin
De Flaviis Franco
Li Guann-Pyng
Orrick Herrington & Sutcliffe LLP
Phan Tho
The Regents of the University of California
LandOfFree
MEMS fabrication on a laminated substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with MEMS fabrication on a laminated substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS fabrication on a laminated substrate will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3712587