MEMS differential actuated nano probe and method for...

Details MEMS differential actuated nano probe and method for... MEMS differential actuated nano probe and method for...

2007-02-13

2007-02-13

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Reexamination Certificate

active

11218425

ABSTRACT:
A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.

REFERENCES:
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patent: 2002/0061662 (2002-05-01), Boggild
patent: 2003/0182993 (2003-10-01), Hantschel et al.
patent: 2004/0118192 (2004-06-01), Kley
Vettiger et al., IBM J. Res. Develop., vol. 44, No. 3, May 2000, pp. 323-340.
Bullen et al., “Micromachined Arrayed Dip Pen Nanolithography Probes for Sub-100nm Direct Chemistry Patterning,” I.E.E.E. 2003.

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