Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – With longitudinally expansible solid element
Reexamination Certificate
2011-07-05
2011-07-05
Decady, Albert (Department: 2121)
Electricity: electrothermally or thermally actuated switches
Electrothermally actuated switches
With longitudinally expansible solid element
C700S302000, C337S132000, C337S139000, C382S233000, C060S527000
Reexamination Certificate
active
07973637
ABSTRACT:
The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
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Gasparyan Arman
Gates, II John VanAtta
Simon Maria Elina
Alcatel-Lucent USA Inc.
De'cady Albert
Gami Tejal J
Hitt Gaines P.C.
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