Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – With longitudinally expansible solid element
Reexamination Certificate
2006-03-23
2010-10-12
McNeil, Jennifer C (Department: 1784)
Electricity: electrothermally or thermally actuated switches
Electrothermally actuated switches
With longitudinally expansible solid element
C337S123000, C200S266000
Reexamination Certificate
active
07812703
ABSTRACT:
A material for forming a conductive structure for a MEMS device is described, which is an alloy containing about 0.01% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower than the sheet resistance of the pure metal. In addition, the alloy may have superior creep and higher recrystallization temperature than the pure metal. It is hypothesized that these advantageous material properties are a result of the larger grain structure existing in the NiMn alloy film compared to the pure nickel metal film. These properties may make the alloy appropriate for applications such as MEMS thermal electrical switches for telecommunications applications.
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Carlson Gregory A.
Foster John S.
Liu Donald C.
Thompson Douglas L.
Innovative Micro Technology
Krupicka Adam C
McNeil Jennifer C
Spong Jaquelin K.
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