MEMS device fabricated on a pre-patterned substrate

Details MEMS device fabricated on a pre-patterned substrate MEMS device fabricated on a pre-patterned substrate

2008-04-16

2010-02-16

Rahll, Jerry T (Department: 2874)

Optical waveguides

Directional optical modulation within an optical waveguide

Electro-optic

C385S019000, C359S224200, C359S319000, C438S673000

Reexamination Certificate

active

07664345

ABSTRACT:
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.

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