Measuring and testing – Fluid pressure gauge – Electrical
Reexamination Certificate
2009-11-18
2011-11-29
Allen, Andre (Department: 2855)
Measuring and testing
Fluid pressure gauge
Electrical
C073S756000, C438S052000
Reexamination Certificate
active
08065919
ABSTRACT:
A MEMS device includes: a substrate having a through hole; a first film provided on a top surface of the substrate with a bottom surface of the first film exposed in the through hole; a second film provided over the first film with an air gap interposed therebetween, and having a hole grouping including holes each in communication with the air gap; and a supporting layer interposed between the first and second films and having the air gap formed therein. Outermost holes of the hole grouping are located at regular intervals along a shape of an opening of the through hole at an upper open end.
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Loeppert, P. V. et al., “SiSonic™—The First Commercialized MEMS Microphone,” Solid-State Sensors, Actuators, and Microsystems Workshop, Jun. 4-8, 2006, pp. 27-30.
Allen Andre
McDermott Will & Emery LLP
Panasonic Corporation
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