Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2007-12-04
2007-12-04
Noori, Max (Department: 2855)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
Reexamination Certificate
active
10949723
ABSTRACT:
An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.
REFERENCES:
patent: 5659195 (1997-08-01), Kaiser et al.
patent: 6127744 (2000-10-01), Streeter et al.
patent: 6201629 (2001-03-01), McClelland et al.
patent: 6667725 (2003-12-01), Simons et al.
patent: 6744338 (2004-06-01), Nikitin
patent: 6835587 (2004-12-01), Kubena et al.
patent: 6909589 (2005-06-01), Huff
patent: 6930368 (2005-08-01), Hartwell et al.
patent: 2003/0220556 (2003-11-01), Porat et al.
patent: 2004/0011137 (2004-01-01), Hnat et al.
patent: 2006/0052782 (2006-03-01), Morgan et al.
K.I. Arshak, D. McDonagh, M.A. Durcan, “Development of New Capacitive Strain Sensors Based on Thick Film Polymer and Cermet Technologies”, Sensors and Actuators, vol. 79, 2000, pp. 102-114.
A. DeHennis, K.D. Wise, “A Passive-Telemetry-Based Pressure Sensing System”, Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, Jun. 2-6, 2002, pp. 165-168.
M. Kanayama, B.W. Cunningham, J.C. Weis, L.M. Parker, K. Kaneda, P.C. McAfee, “Maturation of the Posterolateral Spinal Fusion and Its Effect on Load-Sharing of Spinal Instrumentation: An In Vivo Sheep Model”, Bone Joint Surg. Am., vol. 79-A(11), Nov. 1997, pp. 1710-1720.
Crain Mark
Hnat William
Jackson Douglas
Lin Ji-Tzuoh
Naber John
Frost Brown Todd LLC
Noori Max
LandOfFree
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