Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2007-06-29
2010-12-07
Nhu, David (Department: 2895)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S141000, C438S238000, C438S381000, C257SE21170, C257SE21229, C257SE21334, C257SE21352, C257SE21361, C257SE21372
Reexamination Certificate
active
07846785
ABSTRACT:
In some aspects, a method of forming a memory cell is provided that includes (1) forming a first conductor above a substrate; (2) forming a diode above the first conductor; (3) forming a reversible resistance-switching element above the first conductor using a selective deposition process; and (4) forming a second conductor above the diode and the reversible resistance-switching element. Numerous other aspects are provided.
REFERENCES:
patent: 2655609 (1953-10-01), Shockley
patent: 2971140 (1959-12-01), Chappey et al.
patent: 3796926 (1974-03-01), Cole et al.
patent: 4204028 (1980-05-01), Donley
patent: 4499557 (1985-02-01), Holmberg et al.
patent: 4646266 (1987-02-01), Ovshinsky et al.
patent: 4772571 (1988-09-01), Scovell et al.
patent: 4907054 (1990-03-01), Berger
patent: 4940553 (1990-07-01), von Benda
patent: 5037200 (1991-08-01), Kodama
patent: 5166758 (1992-11-01), Ovshinsky et al.
patent: 5273915 (1993-12-01), Hwang et al.
patent: 5311055 (1994-05-01), Goodman et al.
patent: 5774394 (1998-06-01), Chen et al.
patent: 5876788 (1999-03-01), Bronner et al.
patent: 5915167 (1999-06-01), Leedy
patent: 6034882 (2000-03-01), Johnson et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6369431 (2002-04-01), Gonzalez et al.
patent: 6426891 (2002-07-01), Katori
patent: 6465370 (2002-10-01), Schrems
patent: 6483734 (2002-11-01), Sharma et al.
patent: 6534841 (2003-03-01), Van Brocklin et al.
patent: 6541792 (2003-04-01), Tran et al.
patent: 6707698 (2004-03-01), Fricke et al.
patent: 6753561 (2004-06-01), Rinerson et al.
patent: 6761985 (2004-07-01), Windisch et al.
patent: 6774458 (2004-08-01), Fricke et al.
patent: 6778441 (2004-08-01), Forbes et al.
patent: 6787401 (2004-09-01), Gonzalez et al.
patent: 6798685 (2004-09-01), Rinerson et al.
patent: 6815744 (2004-11-01), Beck et al.
patent: 6831854 (2004-12-01), Rinerson et al.
patent: 6834008 (2004-12-01), Rinerson et al.
patent: 6836421 (2004-12-01), Rinerson et al.
patent: 6850429 (2005-02-01), Rinerson et al.
patent: 6850455 (2005-02-01), Rinerson et al.
patent: 6856536 (2005-02-01), Rinerson et al.
patent: 6859382 (2005-02-01), Rinerson et al.
patent: 6870755 (2005-03-01), Rinerson et al.
patent: 6946719 (2005-09-01), Petti et al.
patent: 6952030 (2005-10-01), Herner et al.
patent: 7116573 (2006-10-01), Sakamoto et al.
patent: 7176064 (2007-02-01), Herner
patent: 7215564 (2007-05-01), Happ et al.
patent: 7224013 (2007-05-01), Herner et al.
patent: 7238607 (2007-07-01), Dunton et al.
patent: 7265049 (2007-09-01), Herner et al.
patent: 7307268 (2007-12-01), Scheuerlein
patent: 7391064 (2008-06-01), Tripsas et al.
patent: 7405465 (2008-07-01), Herner
patent: 7501331 (2009-03-01), Herner
patent: 7575984 (2009-08-01), Radigan et al.
patent: 2002/0057594 (2002-05-01), Hirai
patent: 2003/0013007 (2003-01-01), Kaun
patent: 2003/0047727 (2003-03-01), Chiang
patent: 2003/0081446 (2003-05-01), Fricke et al.
patent: 2003/0209971 (2003-11-01), Kozicki
patent: 2004/0002186 (2004-01-01), Vyvoda et al.
patent: 2004/0084743 (2004-05-01), Vanbuskirk et al.
patent: 2004/0095300 (2004-05-01), So et al.
patent: 2004/0159828 (2004-08-01), Rinerson et al.
patent: 2004/0159867 (2004-08-01), Kinney et al.
patent: 2004/0159869 (2004-08-01), Rinerson et al.
patent: 2004/0160798 (2004-08-01), Rinerson et al.
patent: 2004/0160804 (2004-08-01), Rinerson et al.
patent: 2004/0160805 (2004-08-01), Rinerson et al.
patent: 2004/0160806 (2004-08-01), Rinerson et al.
patent: 2004/0160807 (2004-08-01), Rinerson et al.
patent: 2004/0160808 (2004-08-01), Rinerson et al.
patent: 2004/0160812 (2004-08-01), Rinerson et al.
patent: 2004/0160817 (2004-08-01), Rinerson et al.
patent: 2004/0160818 (2004-08-01), Rinerson et al.
patent: 2004/0160819 (2004-08-01), Rinerson et al.
patent: 2004/0161888 (2004-08-01), Rinerson et al.
patent: 2004/0170040 (2004-09-01), Rinerson et al.
patent: 2004/0228172 (2004-11-01), Rinerson et al.
patent: 2004/0245557 (2004-12-01), Seo et al.
patent: 2005/0045919 (2005-03-01), Kaeriyama et al.
patent: 2005/0058009 (2005-03-01), Yang
patent: 2005/0158950 (2005-07-01), Scheuerlein et al.
patent: 2005/0167699 (2005-08-01), Sugita
patent: 2005/0247921 (2005-11-01), Lee et al.
patent: 2005/0286211 (2005-12-01), Pinnow et al.
patent: 2006/0006495 (2006-01-01), Herner et al.
patent: 2006/0067117 (2006-03-01), Petti
patent: 2006/0094236 (2006-05-01), Elkins
patent: 2006/0098472 (2006-05-01), Ahn et al.
patent: 2006/0128153 (2006-06-01), Dunton et al.
patent: 2006/0157679 (2006-07-01), Scheuerlein
patent: 2006/0164880 (2006-07-01), Sakamoto et al.
patent: 2006/0250836 (2006-11-01), Herner et al.
patent: 2006/0250837 (2006-11-01), Herner et al.
patent: 2006/0268594 (2006-11-01), Toda
patent: 2006/0273298 (2006-12-01), Petti
patent: 2007/0010100 (2007-01-01), Raghuram et al.
patent: 2007/0072360 (2007-03-01), Kumar et al.
patent: 2007/0114508 (2007-05-01), Herner et al.
patent: 2007/0114509 (2007-05-01), Herner
patent: 2007/0190722 (2007-08-01), Herner
patent: 2007/0228354 (2007-10-01), Scheuerlein
patent: 2007/0228414 (2007-10-01), Kumar
patent: 2007/0236981 (2007-10-01), Herner
patent: 2007/0246743 (2007-10-01), Cho et al.
patent: 2008/0175032 (2008-07-01), Tanaka et al.
patent: 2009/0001342 (2009-01-01), Schricker et al.
patent: 2009/0001343 (2009-01-01), Schricker et al.
patent: 2009/0001344 (2009-01-01), Schricker et al.
patent: 2009/0104756 (2009-04-01), Kumar
patent: 2009/0236581 (2009-09-01), Yoshida et al.
patent: 1 308 960 (2003-05-01), None
patent: 1 484 799 (2004-12-01), None
patent: 1 513 159 (2005-03-01), None
patent: 1 914 806 (2008-04-01), None
patent: 1 284 645 (1972-08-01), None
patent: 1 416 644 (1975-12-01), None
patent: 1416644 (1975-12-01), None
patent: 62042582 (1987-02-01), None
patent: 100 717 286 (2007-05-01), None
patent: WO 97/41606 (1997-11-01), None
patent: WO 00/49659 (2000-08-01), None
patent: WO 01/69655 (2001-09-01), None
patent: WO 03/079463 (2003-09-01), None
patent: WO 2004/084229 (2004-09-01), None
patent: WO 2005/008783 (2005-01-01), None
patent: WO 2005/024839 (2005-03-01), None
patent: WO 2006/078505 (2006-07-01), None
patent: WO 2007/004843 (2007-01-01), None
patent: WO 2007/018026 (2007-02-01), None
patent: WO 2007/038709 (2007-04-01), None
patent: WO 2007/062022 (2007-05-01), None
patent: WO 2007/067448 (2007-06-01), None
patent: WO 2007/072308 (2007-06-01), None
patent: WO 2008/097742 (2008-08-01), None
Hiatt et al., “Bistable Switching In Niobium Oxide Diodes”, Mar. 15, 1965, Applied Physics Lettes, AIP, American Institute of Physics, Melville, NY, US, vol. 6, No. 6, pp. 106-108.
Hwang et al., “Molecular Dynamics Simulations of Nanomemory Element Based on Boron-Nitride Nanotube-To-Peapod Transition”, Apr. 2005, Computational Materials Science, Elsevier, Amsterdam, NL, vol. 33, No. 1-3, pp. 317-324.
Prince, B, “Trends in Scaled and Nanotechnology Memories”, Sep. 2005, Non-Volatile Memory Technology Symposium, IEEE, Piscataway, NJ, USA, pp. 55-61.
Mime, Liti, “ReRAM with Erase/Read Speed of 3 ns, Applicable as Multi-level Oell”, Dec. 26, 2006, Nikkei Electronics, <http://techon.nikkeibp.co.jp/english/NEWS—EN/20061226/125918/>; pp. 1-2.
Baek et al., “Multi-layer Cross-point Binary Oxide Resistive Memory (OxRRAM) for Post-NAND Storage Application,” 2005, pp. 1-4, IEEE.
Baek. I.G.,et al., Highly Scalable Non-volatile Resistive Memory Using Simple Binary Oxide Driven By Asymmetric Unipolar Voltage Pulese; IEDM (2004), (Jan. 2004), 587-590.
Beck, et al., “Reproducible Switching Effect in Thin Oxide Films for Memory Applications,” Applied Physics Letters, vol. 77, No. 1, Jul. 3, 2000, pp. 139-141, XP00958527, ISSN: 0003-6951.
Bruyere et al., “Switching and Negative Resistance in Thin Films of Nickel Oxide”, Applied Physics Letters, vol. 16, No. 1, Jan. 1, 1970, pp. 40-43.
Pagnia, H., et al., “Bistable switching in Electroformed Metal-Insulator-Metal Devices”, Phvs. Stat. Sol. A 108 11 (1988), 10-65.
Park, Jae-Wan., et at. “Reproducible resistive switching in nonstoichiometric ni
Herner Brad
Konevecki Michael W.
Schricker April
Dugan & Dugan P.C.
Nhu David
SanDisk 3D LLC
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