Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-05-22
1998-01-20
Saadat, Mahshid D.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257393, 257401, 257903, 257904, H01L 2976, H01L 2711
Patent
active
057104492
ABSTRACT:
Lightly doped active regions in a semiconductor structure reduce occurrences of pipeline defects. The light doped active region are typically employed where performance is not adversely affected. For example, in memory cells, pass transistors have lightly doped drains which directly connect to bit lines. A pass transistor of this type can have the source more heavily doped than the drain. Alternatively, drains and sources of pass transistors are lightly doped. Drains of pull-down transistors can also be lightly doped. The difference in doping of active regions does not increase fabrication processing steps because conventionally active regions are formed by two doping steps to create a lightly doped portions adjacent gates where field strength is highest. The invention changes such processes by covering the desired lightly active regions with the mask used during a second doping process.
REFERENCES:
patent: 5489790 (1996-02-01), Lage
Belgal et al., "A New Mechanism of Pipeline Defect Formation in CMOS Devices", IEEE/IRPS, 1991 pp. 399-404 no month.
Wang et al., "Pipeline Defects in CMOS Mosfet Devices Caused by SWAMI Isolation", IEEE/IRPS, 1992, pp. 85-90 no month.
Lien Chuen-Der
Wang Pailu D.
Integrated Device Technology Inc.
Martin Wallace Valencia
Saadat Mahshid D.
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