Megasonic cleaning system

Details Megasonic cleaning system Megasonic cleaning system

1998-09-25

1999-07-27

Warden, Jill

Cleaning and liquid contact with solids

Apparatus

With movably or flexibly mounted spray or jet applying...

134902, 134144, B08B 310, B08B 312

Patent

active

059273089

ABSTRACT:
A megasonic cleaning system includes a transducer on which a substrate to be cleaned is placed. An oscillating electrically energy source is coupled to the transducer for driving the transducer to produce acoustical energy at substantially megasonic frequencies to vibrate the substrate. A blower assembly is arranged over the substrate, and the blower assembly contains a hollow elongate member having a plurality of nozzles spaced along a length thereof. A drive mechanism is connected to the blower assembly such that the blower assembly is horizontally movable relative to the surface of the substrate. A source of cleaning fluid is in flow communication with the nozzles, and the nozzles are arranged such that a flow path of cleaning fluid through the nozzles is inclined toward an upper surface of the substrate to be cleaned. A vacuum source is in flow communication with the substrate for vacuum-adhering the substrate on the transducer via a vacuum force. The cleaning fluid flowing through the nozzles is directed toward the upper surface of the substrate to blow away particles on the upper surface of the substrate that are dislodged by the vibration of the substrate.

REFERENCES:
patent: 2950725 (1960-08-01), Jacke et al.
patent: 3066686 (1962-12-01), O'Neill
patent: 3937236 (1976-02-01), Runnells
patent: 4710233 (1987-12-01), Hohmann et al.
patent: 4763677 (1988-08-01), Miller
patent: 5203362 (1993-04-01), Shibata
patent: 5377709 (1995-01-01), Shibano
patent: 5534076 (1996-07-01), Bran
patent: 5555902 (1996-09-01), Menon
patent: 5625249 (1997-04-01), Grant
patent: 5711327 (1998-01-01), Fields
patent: 5722444 (1998-03-01), Prokopenko et al.
patent: 5794299 (1998-04-01), Gocket et al.
patent: 5803099 (1998-09-01), Sakuta et al.
Quan Qi et al., "Mechanisms of Removal of Micron-Sized Particles by High-Frequency Ultrasonic Waves," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 42, No. 4, Jul. 1995, pp. 619-629.

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