Mechanical supports for very thin stacked capacitor plates

Details Mechanical supports for very thin stacked capacitor plates Mechanical supports for very thin stacked capacitor plates

1996-02-23

1999-11-09

Crane, Sara

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257306, 257309, H01L 27108

Patent

active

059819928

ABSTRACT:
A stacked capacitor having very thin fins and subminimum dimension supports for the fins is described. The capacitor includes a stack of conductive layers on a substrate. A plurality of subminimum dimension trenches are formed in the stack and a columnar conductive layer lines the trenches in contact with alternate layers of the stack. An insulator lines these alternate layers and the columnar conductive layer and capacifively couples these alternate layers and the columnar conductive layer to a second plate layer that is formed between the alternate layers, within the columnar layers in the trenches, and extending between stacked capacitors.

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