Mechanical fastener to hold a polishing pad on a platen in a che

Details Mechanical fastener to hold a polishing pad on a platen in a che Mechanical fastener to hold a polishing pad on a platen in a che

1997-07-11

1999-08-03

Rose, Robert A.

Abrading

Machine

Rotary tool

451 41, 451 60, 451921, 451288, 403321, 285320, B24B 500

Patent

active

059317248

ABSTRACT:
A chemical mechanical polishing apparatus includes a rotatable platen for receiving a polishing pad. The polishing pad is attached to a polishing pad support plate. The polishing pad support plate is removably secured to the platen by a fastening assembly.

REFERENCES:
patent: 3342652 (1967-09-01), Reisman et al.
patent: 3708921 (1973-01-01), Cronkhite et al.
patent: 3731435 (1973-05-01), Boettcher et al.
patent: 3841031 (1974-10-01), Walsh
patent: 3898770 (1975-08-01), Benz et al.
patent: 3913271 (1975-10-01), Boettcher
patent: 4519168 (1985-05-01), Cesna
patent: 4918870 (1990-04-01), Torbert et al.
patent: 4940507 (1990-07-01), Harbarger
patent: 5246525 (1993-09-01), Sato
patent: 5421769 (1995-06-01), Schultz et al.
patent: 5498199 (1996-03-01), Karlsrud et al.
patent: 5647792 (1997-07-01), Katsuoka et al.
patent: 5679064 (1997-10-01), Nishi et al.
patent: 5704827 (1998-01-01), Nishi et al.

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