Measurement of the curvature of a surface using parallel light b

Details Measurement of the curvature of a surface using parallel light b Measurement of the curvature of a surface using parallel light b

1996-11-25

1999-06-15

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

059127384

ABSTRACT:
Apparatus for measuring curvature of a surface wherein a beam of collimated light is passed through means for producing a plurality of parallel light beams each separated by a common distance which then reflect off the surface to fall upon a detector that measures the separation of the reflected beams of light. This means can be an etalon and the combination of a diffractive element and a converging lens. The curvature of the surface along the line onto which the multiple beams fall can be calculated from this information. A two-dimensional map of the curvature can be obtained by adding a second etalon (or a second combination of a diffractive element and a converging lens) which is rotated 90.degree. about the optical axis relative to the first etalon and inclined at the same angle. The second etalon creates an individual set of parallel light beams from each of the individual beams created by the first etalon with the sets of parallel light beams from the second etalon rotated 90.degree. relative to the line onto which the single set of parallel beams from the first etalon would have fallen.

REFERENCES:
patent: 4291990 (1981-09-01), Takasu
patent: 4929846 (1990-05-01), Mansour
Hammond et al., "Detecting Surface Deformities" IBM Technical Disclosure Bulletin , vol 14, No.1 (Jun. 1971) pp.49-50.
Mechanical Streeses in (Sub)monolayer Epitaxial Films, A. J. Schell-Sorokin and R. M. Tromp, Physical Review Letters, vol. 64, Number 9, Feb. 26, 1990, pp. 1039-1042.

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