Measuring and testing – Volumetric content measuring
Patent
1997-06-06
2000-03-21
Williams, Hezron
Measuring and testing
Volumetric content measuring
73290B, 7386142, G01F 1700
Patent
active
060389192
ABSTRACT:
In a process and apparatus for delivering a processing substance from a storage vessel to a processing station, the storage vessel enclosing a processing substance storage space and being coupled to conduits which communicate with the storage space, the storage vessel and the conduits enclosing a volume which includes the storage space, a method and system for determining the quantity of processing substance in the storage space by: closing the volume enclosed by the storage vessel and the conduits; performing first and second pressure measurements for measuring the gas pressure in the volume when the volume contains respectively first and second quantities of gas; determining the difference between the first and second quantities of gas; and calculating the quantity of processing substance in the storage space on the basis of the volume, the difference between the first and second quantities of gas and the gas pressures measured during the first and second pressure measurements.
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patent: 5535624 (1996-07-01), Lehmann
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U.S. patent application serial No. 08/928,371, filed Sep. 12, 1997 (Atty. Dk. # 2041/PVD/DV).
U.S. patent application serial No. 08/922,510, filed Sep. 3, 1997 (Atty. Dk. #2036/PVD/DV).
Marsh Richard A.
Schmitt John V.
Applied Materials Inc.
Guenzer Charles S.
Tran Thuy Vinh
Williams Hezron
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