Measurement of object deformation with optical profiler

Details Measurement of object deformation with optical profiler Measurement of object deformation with optical profiler

2007-10-16

2007-10-16

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S495000

Reexamination Certificate

active

10759686

ABSTRACT:
An interferometric profiler is used to measure object motion by modifying the motion of the scanner so that the phase variation at each scanning step is kept within the acceptable limits of the algorithm used to calculate phase changes. The scanner motion is so manipulated on the basis of prior knowledge about the nature of the object motion, or knowledge obtained by pre-calibration, or by real-time feedback based on current measurements. The object motion is recovered from the scanning information by subtracting the scanner position from the object position as it evolves during the scan.

REFERENCES:
patent: 6624894 (2003-09-01), Olszak et al.
patent: 2002/0196450 (2002-12-01), Olszak et al.
Michael Pawlowski et al. in “Shape and motion measurement of time-varying three-dimensional objects based on spatiotemporal fringe-pattern analysis,” Opt. Eng. 41(2) 450-459 (2002).
Xavier Colonna de Lega et al. in “Deformation measurement with object-induced dynamic phase shifting,” Applied Optics, vol. 35, No. 25, 5115-5121 (1996).

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