Measurement of critical dimensions using X-ray diffraction...

Details Measurement of critical dimensions using X-ray diffraction... Measurement of critical dimensions using X-ray diffraction...

2006-09-19

2006-09-19

Thomas, Courtney (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S086000

Reexamination Certificate

active

07110491

ABSTRACT:
A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.

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