Means for periodic desorption of a cryopump

Details Means for periodic desorption of a cryopump Means for periodic desorption of a cryopump

1984-06-29

1990-03-27

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62264, 62268, 417901, B01D 800

Patent

active

049109650

ABSTRACT:
The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively irradiating the primary cryopanel from a location external to the vacuum chamber. The radiation raises the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.

REFERENCES:
patent: 2749720 (1956-06-01), Williams, Jr.
patent: 4438632 (1984-03-01), Lessard et al.

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