Means for locking a workpiece to a beam-generating apparatus

Details Means for locking a workpiece to a beam-generating apparatus Means for locking a workpiece to a beam-generating apparatus

1987-02-17

1988-11-01

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504421, 2504911, G01F 2100, G21K 510

Patent

active

047822368

ABSTRACT:
A positioning table includes a light-weight workpiece supported thereabove on programmed dynamic support assemblies below a beam-generating apparatus. The positioning table performs gross positioning of the workpiece to bring a desired portion thereof under the influence of the beam-generating apparatus. The programmed dynamic support assemblies are actuated in a three-step sequence first for urging stabilizing posts on the workpiece into stabilizing contact with a base structure of the beam-generating apparatus, second for urging spring rods into contact with the bottom surface of the workpiece, and then for leaving the workpiece supported by the spring rods with the stabilizing posts in firm mechanical contact with the base structure of the beam-generating apparatus. Transverse vibrations in the beam-generating apparatus are directly transmitted to the workpiece through the stabilizing posts, whereby relative motion between the workpiece and the beam-generating apparatus is prevented. Transverse vibration in the positioning table are accommodated by the transverse resilience of the spring rods without transmitting such vibrations to the workpiece.

REFERENCES:
patent: 3426193 (1969-02-01), Guernet
patent: 3678270 (1972-07-01), Braun et al.
patent: 4525852 (1985-06-01), Rosenberg
patent: 4689516 (1987-08-01), Yokoyama et al.
patent: 4705951 (1987-11-01), Layman et al.

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